美国 · 通讯社与实时数据 · PR Newswire
100% Bearing Free: Maglev Enables 6-DOF with Zero Contact, Applications in Hybrid Bonding, Wafer Metrology
Three technology demonstrators, a 400mm linear stage, a rotary wafer stage, and a picometer-class AFM scanner, correct motion errors electronically with no bearing contact,…
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