United States · Wires & real time · PR Newswire

100% Bearing Free: Maglev Enables 6-DOF with Zero Contact, Applications in Hybrid Bonding, Wafer Metrology

Published by PR Newswire · United States 57 min ago

Three technology demonstrators, a 400mm linear stage, a rotary wafer stage, and a picometer-class AFM scanner, correct motion errors electronically with no bearing contact,…

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100% Bearing Free: Maglev Enables 6-DOF with Zero Contact, Applications in Hybrid Bonding, Wafer Metrology

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